Thin films of cobalt oxides obtained by vacuum co-deposition of Co and TeO2

被引：7

作者：

Kitova, S ^{[1
]}

Rashkova, V ^{[1
]}

Konstantinov, I ^{[1
]}

机构：

[1] Bulgarian Acad Sci, Acad J Malinowski, Cent Lab Photoproc, BU-1113 Sofia, Bulgaria

来源：

VACUUM | 2002年 / 69卷 / 1-3期

关键词：

cobalt oxides; thin films; vacuum deposition; thermal effects;

D O I：

10.1016/S0042-207X(02)00366-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The composition and structure of thin films obtained by vacuum co-deposition of Co and TeO2 in an atomic ratio R-Co/Te = 1.5 are studied. It is shown that during the co-deposition a chemical reaction between both substances takes place resulting in the formation of amorphous CoO phase and elemental Te, very finely dispersed in the amorphous matrix. The reaction in as-deposited films proceeds until the complete oxidation of Co to Co2+. It is found that the crystalline phases of CoO, Co3O4 and/or Te are formed upon thermal heating of the films above 300degreesC. In this case, the reaction proceeds until complete consumption of TeO2 via the oxidation of Co2+ to higher valence and the formation of mixed oxides. (C) 2002 Elsevier Science Ltd. All rights reserved.

引用

页码：405 / 409

页数：5

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