Molecular dynamics simulation of hyperthermal neutrals generated by energetic ion impact on a metal plate

被引：1
|
作者：
Park, Seung-Hoon [1 ]
Yoo, Suk Jae [2 ]
Chang, Choong-Seock [1 ,3 ]
机构：
[1] Korea Adv Inst Sci & Technol, Dept Phys, Taejon 305701, South Korea
[2] Natl Fus Res Inst, Taejon 305333, South Korea
[3] NYU, Courant Inst Math Sci, New York, NY 10012 USA
来源：
JOURNAL OF APPLIED PHYSICS | 2010年 / 107卷 / 01期
关键词：
ion-surface impact; molecular dynamics method; plasma materials processing; plates (structures); surface roughness; surface structure; tungsten; TRANSITION-METALS; BEAM; DAMAGE;
D O I：
10.1063/1.3276097
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A hyperthermal neutral beam (HNB) source is one of candidate methods to reduce plasma-induced damage problems. The HNB is generated by vertical collisions between energetic ions and a reflector composed of a tungsten plate. We perform a HNB generation simulation using a molecular dynamics algorithm. The roughness of the reflector surface is experimentally measured and the surface structure is taken into consideration in the simulation. The energy and angular distributions of the HNB are obtained by the simulation and the energy yield of the reflected neutral particles is found to be in good agreement with experimental data.
引用
收藏
页数：5
相关论文
共 50 条
  • [41] MELTING OF METAL NANOWIRES: MOLECULAR DYNAMICS SIMULATION
    Vasilyev, S. A.
    Kartoshkin, A. Yu
    Samsonov, M., V
    Dyakova, E., V
    PHYSICAL AND CHEMICAL ASPECTS OF THE STUDY OF CLUSTERS NANOSTRUCTURES AND NANOMATERIALS, 2018, (10) : 204 - 209
  • [42] Molecular dynamics simulation of the formation of metal nanocontacts
    A. L. Klavsyuk
    S. V. Kolesnikov
    E. M. Smelova
    A. M. Saletsky
    Physics of the Solid State, 2011, 53 : 2356 - 2360
  • [43] Molecular dynamics simulation of metal nanoislands growth
    Kapralov, N. V.
    Babich, E. S.
    Redkov, A. V.
    INTERNATIONAL CONFERENCE PHYSICA.SPB/2016, 2017, 929
  • [44] Molecular dynamics simulation of film growth by energetic aluminum cluster impact (vol 38, pg 158, 2001)
    Kang, JW
    Choi, KS
    Kang, JC
    Byun, KR
    Hwang, HJ
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2001, 38 (04) : 439 - 439
  • [45] Etching of SiC by energetic F2:: Molecular dynamics simulation
    Gou, F.
    Liang, M. C.
    Chen, Z.
    Qian, Qiu
    APPLIED SURFACE SCIENCE, 2007, 253 (21) : 8743 - 8748
  • [46] Molecular dynamics simulation of the energetic reaction between Ni and Al nanoparticles
    Henz, Brian J.
    Hawa, Takumi
    Zachariah, Michael
    JOURNAL OF APPLIED PHYSICS, 2009, 105 (12)
  • [47] Molecular dynamics simulation of deposition and etching of Si bombarding by energetic SiF
    Gou, F.
    APPLIED SURFACE SCIENCE, 2007, 253 (12) : 5467 - 5472
  • [48] Efficient heavy metal ion removal by fluorographene nanochannel templated molecular sieve: a molecular dynamics simulation study
    Ou, Youguan
    Gu, Zonglin
    Luo, Yuqi
    SCIENTIFIC REPORTS, 2024, 14 (01)
  • [49] Efficient heavy metal ion removal by fluorographene nanochannel templated molecular sieve: a molecular dynamics simulation study
    Youguan Ou
    Zonglin Gu
    Yuqi Luo
    Scientific Reports, 14
  • [50] Molecular dynamics simulation of defect formation during energetic Cu deposition
    Gilmore, CM
    Sprague, JA
    THIN SOLID FILMS, 2002, 419 (1-2) : 18 - 26
12345