Molecular dynamics simulation of hyperthermal neutrals generated by energetic ion impact on a metal plate

被引:1
|
作者
Park, Seung-Hoon [1 ]
Yoo, Suk Jae [2 ]
Chang, Choong-Seock [1 ,3 ]
机构
[1] Korea Adv Inst Sci & Technol, Dept Phys, Taejon 305701, South Korea
[2] Natl Fus Res Inst, Taejon 305333, South Korea
[3] NYU, Courant Inst Math Sci, New York, NY 10012 USA
关键词
ion-surface impact; molecular dynamics method; plasma materials processing; plates (structures); surface roughness; surface structure; tungsten; TRANSITION-METALS; BEAM; DAMAGE;
D O I
10.1063/1.3276097
中图分类号
O59 [应用物理学];
学科分类号
摘要
A hyperthermal neutral beam (HNB) source is one of candidate methods to reduce plasma-induced damage problems. The HNB is generated by vertical collisions between energetic ions and a reflector composed of a tungsten plate. We perform a HNB generation simulation using a molecular dynamics algorithm. The roughness of the reflector surface is experimentally measured and the surface structure is taken into consideration in the simulation. The energy and angular distributions of the HNB are obtained by the simulation and the energy yield of the reflected neutral particles is found to be in good agreement with experimental data.
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页数:5
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