Test System for Wafer-Level Silicon-Photonics Testing

被引：0

作者：

Zhang, Peng ^{[1
,2
]}

Tang, Bo ^{[2
]}

Yang, Yan ^{[2
]}

Li, Bin ^{[2
]}

Liu, Ruonan ^{[2
]}

Xie, Ling ^{[2
]}

Li, Zhihua ^{[2
]}

Lin, Fujiang ^{[1
]}

机构：

[1] Univ Sci & Technol China, Hefei 23300, Peoples R China

[2] Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China

来源：

OPTICAL DESIGN AND TESTING X | 2020年 / 11548卷

关键词：

silicon photonics; wafer-level testing;

D O I：

10.1117/12.2573456

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Silicon photonics has emerged as an attractive technology for developing low-cost and high-speed optical communication and optical interconnects. We design a test station which enables semi-automatic for optical-optical and electro-optical testing of passive and active device. Advances in automated wafer-level optical test enable statistical photonic device characterization for development, photonic modeling, and manufacturing controls. Meanwhile we study the influence of fiber tilt angle and height on the measurement.

引用

页数：8

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