Three-dimensional atom-probe tomography: Advances and applications

被引：312
|
作者：
Seidman, David N. [1 ]
机构：
[1] Northwestern Univ, Northwestern Univ Ctr Atom Probe Tomog, Dept Mat Sci & Engn, Evanston, IL 60208 USA
来源：
ANNUAL REVIEW OF MATERIALS RESEARCH | 2007年 / 37卷
关键词：
field-ion microscopy; time-of-flight mass spectrometry; laser-assisted LEAP (TM) tomography; alpha-Al/Al3Sc heterophase interfaces; Ni-Al-Cr alloys; Ni-Al-Cr-Re alloys; InAs nanowires;
D O I：
10.1146/annurev.matsci.37.052506.084200
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This review presents the historical temporal evolution of an atom-probe tomograph (APT) from its genesis (1973) from field-ion microscope images of individual tungsten atoms (1955). The capabilities of modern APTs employing either electrical or laser pulsing are discussed. The results of the application of APTs to specific materials science problems are presented for research performed at Northwestern University on the following problems: (a) the segregation of Mg at alpha-Al/Al-3 Sc heterophase interfaces, (b) phase decomposition in ternary Ni-Al-Cr and quaternary Ni-Al-Cr-Re alloys, and (c) 3-D nanoscale composition mapping of an InAs semiconductor nanowire whose growth was catalyzed by gold. These results demonstrate that it is now possible to obtain highly quantitative information from APT that can be compared with modeling, theory, simulations, and/or first-principles calculations.
引用
收藏
页码：127 / 158
页数：32
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