Adhesion Studies of CrC/a-C:H Coatings Deposited with Anode Assisted Reactive Magnetron Sputtering Combined with DC-Pulsed Plasma Enhanced Chemical Vapor Deposition

被引：5

作者：

Huang, Zhihong ^{[1
]}

Chen, Zhijie ^{[1
]}

Lang, Wenchang ^{[1
]}

Wang, Xianghong ^{[1
]}

机构：

[1] Wenzhou Polytech, Dept Mech Engn, Wenzhou 325035, Peoples R China

来源：

MATERIALS | 2021年 / 14卷 / 11期

关键词：

a-C; H; interlayer; adhesion; anode assisted; magnetron sputtering; plasma-enhanced chemical vapor deposition; DIAMOND-LIKE CARBON; FILMS; FRICTION; HIPIMS;

D O I：

10.3390/ma14112954

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

We studied the effect of CrC interlayers with different carbon contents on the adhesion of CrC/a-C:H coatings prepared by anode assisted reactive magnetron sputtering combined with DC-pulsed plasma enhanced chemical vapor deposition. The adhesion of the coating was measured by indentation and scratching. The coatings were characterized by Raman, XPS, SEM and Nanoindentation. The adhesion of the CrC/a-C:H coating is best when the carbon content in the interlayer of CrC is 44.5%, the scratch adhesion is 74 N, and the indentation adhesion is HF1. In this case, the elastic modulus of the interlayer CrC (284 GPa) is closest to that of the a-C:H layer (274 GPa). In conclusion, when there is no graphitization in the CrC interlayer, and the elastic modulus of the CrC interlayer is close to that of the a-C:H layer, the CrC/a-C:H coatings show the best adhesion.

引用

页数：12

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