Prediction of the Behavior of a Microcantilever Based Optomechatronic Force Sensor by Finite Element Method

被引：0
|
作者：
Ghanbari, Ahmad [1 ]
Rostami, Ali [1 ]
Fakhrabadi, Mir Masoud Seyyed [1 ]
Janabi-Sharifi, Farrokh [2 ]
机构：
[1] Univ Tabriz, Ctr Excellence Mechatron, Tabriz, Iran
[2] Ryerson Univ, Dept Mech & Ind Engn, Toronto, ON, Canada
来源：
ISOT: 2009 INTERNATIONAL SYMPOSIUM ON OPTOMECHATRONIC TECHNOLOGIES | 2009年
关键词：
optomechatronic; nano mechanical cantilever; sensor; DISPLACEMENT SENSOR;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The main goal of this study is the presentation and development of a novel optomechatronic force sensor based on optical coupling between two waveguides. Static and partially dynamic behavior of proposed system will be studied here.
引用
收藏
页码：324 / +
页数：2
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