Aspects of the performance of a femtosecond laser-pulsed 3-dimensional atom probe

被引:67
|
作者
Cerezo, A.
Clifton, P. H.
Gomberg, A.
Smith, G. D. W.
机构
[1] Univ Oxford, Dept Mat, Oxford OX1 3PH, England
[2] Imago Sci, Oxford NanoSci Div, Milton Keynes MK11 3ER, Bucks, England
关键词
atom probe; laser pulsing; femtosecond laser;
D O I
10.1016/j.ultramic.2007.02.025
中图分类号
TH742 [显微镜];
学科分类号
摘要
Specimen heating is shown to occur in the laser-pulsed 3-dimensional atom probe (3DAP), even in the case of femtosecond pulse lengths. This can have an impact on the spatial resolution of 3DAP analysis, due to surface diffusion, and peak temperatures must be kept sufficiently low to avoid these effects. Similarly, mass resolution can be limited in the analysis of low thermal conductivity materials, due to the slower cool-down of the specimen after the pulse. In such cases, the use of lower repetition frequencies and specimens with large shank angles is shown to improve mass resolution and reduce the noise and degradation in quantitative accuracy resulting from increases in base temperature. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:720 / 725
页数:6
相关论文
共 50 条
  • [21] THE TOMOGRAPHIC ATOM-PROBE - A 3-DIMENSIONAL NANOANALYTICAL TOOL ON A SUBNANOMETRIC SCALE
    BLAVETTE, D
    BOSTEL, A
    MENAND, A
    JOURNAL OF TRACE AND MICROPROBE TECHNIQUES, 1994, 12 (1-2): : 17 - 35
  • [22] ANALYSIS OF CONVENTIONAL AND 3-DIMENSIONAL ATOM-PROBE DATA FOR MULTIPHASE MATERIALS
    CAMUS, E
    ABROMEIT, C
    JOURNAL OF APPLIED PHYSICS, 1994, 75 (05) : 2373 - 2382
  • [23] Revealing the 3-dimensional shape of atom probe tips by atomic force microscopy
    Fleischmann, Claudia
    Paredis, Kristof
    Melkonyan, Davit
    Vandervorst, Wilfried
    ULTRAMICROSCOPY, 2018, 194 : 221 - 226
  • [24] Advances in pulsed-laser atom probe: Instrument and specimen design for optimum performance
    Bunton, Joseph H.
    Olson, Jesse D.
    Lenz, Daniel R.
    Kelly, Thomas F.
    MICROSCOPY AND MICROANALYSIS, 2007, 13 (06) : 418 - 427
  • [25] Broadening the applications of the atom probe technique by ultraviolet femtosecond laser
    Hono, K.
    Ohkubo, T.
    Chen, Y. M.
    Kodzuka, M.
    Oh-ishi, K.
    Sepehri-Amin, H.
    Li, F.
    Kinno, T.
    Tomiya, S.
    Kanitani, Y.
    ULTRAMICROSCOPY, 2011, 111 (06) : 576 - 583
  • [26] Determination of the local oxygen distribution in a commercial titanium alloy by 3-dimensional atom probe
    Reissig, L
    Czubayko, U
    Wanderka, N
    Völkl, R
    Glatzel, U
    ZEITSCHRIFT FUR METALLKUNDE, 2003, 94 (06): : 771 - 773
  • [27] PULSED LASER ATOM PROBE ANALYSIS OF SEMICONDUCTOR-MATERIALS
    CEREZO, A
    GROVENOR, CRM
    SMITH, GDW
    JOURNAL OF MICROSCOPY-OXFORD, 1986, 141 : 155 - 170
  • [28] PULSED LASER ATOM PROBE ANALYSIS OF SEMICONDUCTOR-MATERIALS
    GROVENOR, CRM
    CEREZO, A
    LIDDLE, JA
    SMITH, GDW
    INSTITUTE OF PHYSICS CONFERENCE SERIES, 1987, (87): : 665 - 674
  • [29] PULSED-LASER ATOM PROBE MASS-SPECTROSCOPY
    KELLOGG, GL
    JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1987, 20 (02): : 125 - 136
  • [30] PULSED LASER ATOM PROBE CHARACTERIZATION OF SILICON-CARBIDE
    MILLER, MK
    ANGELINI, P
    CEREZO, A
    MORE, KL
    JOURNAL DE PHYSIQUE, 1989, 50 (C8): : C8459 - C8464