A modeling approach to include mechanical microsystem components into the system simulation

被引:15
|
作者
Neul, R [1 ]
Becker, U [1 ]
Lorenz, G [1 ]
Schwarz, P [1 ]
Haase, J [1 ]
Wunsche, S [1 ]
机构
[1] Robert Bosch GmbH, Stuttgart, Germany
关键词
D O I
10.1109/DATE.1998.655906
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
For MEMS devices modem technologies are used to integrate very complex components and subsystems closely together: Due to mixed-domain problems as well as the occuring interactions between the closely coupled system components the design is a sophisticated process. The interactions between the MEMS components have to be analysed by system simulation already in an early design stage. In this paper a modeling approach is introduced that enables the incorporation of mechanical microsystem components into the system simulation using network and system simulators like SABER. The approach is based on multi-terminal models of basic mechanical elements and their composition to more complex microsystems. First results for a micromechanical resonator are presented.
引用
收藏
页码:510 / 517
页数:8
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