The effects and mechanism of chemical additives on the pyrolysis evolution and microstructure of sol-gel derived Ba1-xSrxTiO3 thin films

被引:18
|
作者
Ding, YP
Jin, CY
Meng, ZY [1 ]
机构
[1] Shanghai Univ Sci & Technol, Dept Mat Sci, Shanghai 201800, Peoples R China
[2] Jiao Tong Univ, Dept Mat Sci, Shanghai 20030, Peoples R China
关键词
BST film; deposition process; crystallization; microstructure;
D O I
10.1016/S0040-6090(00)01227-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The dependence of phase evolution on preparation conditions of precursor sols were investigated by DSC and XRD experiments during the sol-gel processing for Ba1-xSrxTiO3(BST) thin films. Two kinds of crystallization paths of perovskite BST were found during the annealing, which are closely dependent on chelating agent and solution aging. One path was the decomposition of all oxycarbonate intermediate, the other was the solid reaction between Ba/Sr carbonates and titanium oxides. For fresh sol, the addition of acetylacetone (HAcAc) as a chelating agent reduced the crystallization temperature by similar to 70 degreesC. Moreover, the back scattered scanning electron microscopy (BS-SEM) revealed that the HAcAc-derived films were homogeneous in composition in comparison with the heterogeneity of the films prepared with no chelating agent addition. The Variations mentioned above were considered originating from different molecule structures of the precursors. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:196 / 199
页数:4
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