The use of plasma emission diagnostics to improve the performance of large-area a-Si PV modules

被引：1
|
作者：
Carlson, DE [1 ]
DiColli, M [1 ]
Jackson, F [1 ]
Ganguly, G [1 ]
Bennett, M [1 ]
机构：
[1] BP Solar, N Amer Technol Ctr, Toano, VA 23168 USA
来源：
CONFERENCE RECORD OF THE TWENTY-NINTH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE 2002 | 2002年
关键词：
D O I：
10.1109/PVSC.2002.1190799
中图分类号：
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号：
0807 ; 0820 ;
摘要：
We have developed an in-situ diagnostic system that utilizes optical emission spectroscopy (OES) in conjunction with an array of fiber optic probes to measure the spatial distribution of plasmas during the fabrication of amorphous silicon (a-Si) PV modules. The uniformity of the plasma emission was influenced by structural changes in the plasma electrode assembly that can occur with heating and by variations in the substrate-electrode spacing that can occur with warped and misaligned substrates or electrodes. This diagnostic system has been used to improve our deposition reactor design and to optimize the deposition conditions for the fabrication of high performance thin-film tandem modules.
引用
收藏
页码：1106 / 1109
页数：4
相关论文
共 50 条
  • [1] PROCESS TECHNOLOGY FOR MASS-PRODUCTION OF LARGE-AREA A-SI SOLAR MODULES
    BUBENZER, A
    LECHNER, P
    SCHADE, H
    RUBEL, H
    [J]. SOLAR ENERGY MATERIALS AND SOLAR CELLS, 1994, 34 (1-4) : 347 - 358
  • [2] Development of large-area a-Si:H films deposition using controlled VHF plasma
    Kawamura, K
    Mashima, H
    Takeuchi, Y
    Takano, A
    Noda, M
    Yonekura, Y
    Takatsuka, H
    [J]. THIN SOLID FILMS, 2006, 506 : 22 - 26
  • [3] Interconnect capacitance extraction in large-area a-Si imaging systems
    Pham, HH
    Nathan, A
    [J]. AMORPHOUS AND MICROCRYSTALLINE SILICON TECHNOLOGY-1998, 1998, 507 : 61 - 66
  • [4] Pixel circuits and drive schemes for large-area a-Si AMOLED
    Chaji, G. R.
    Ashtiani, S.
    Alexander, S.
    Huang, R.
    Striakhilev, D.
    Servati, P.
    Sakariya, K.
    Kumar, A.
    Nathan, A.
    [J]. IDMC 05: PROCEEDINGS OF THE INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE 2005, 2005, : 366 - 370
  • [5] FABRICATION TECHNOLOGY FOR LARGE-AREA A-SI SOLAR-CELLS
    ICHIKAWA, Y
    [J]. SOLAR ENERGY MATERIALS AND SOLAR CELLS, 1994, 34 (1-4) : 321 - 328
  • [6] Outdoor performance of large area organic PV modules
    Bardizza, Giorgio
    Gracia-Amillo, Ana
    Salis, Elena
    Pavanello, Diego
    Kenny, Robert
    Mullejans, Harald
    Dunlop, Ewan D.
    [J]. 2020 47TH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE (PVSC), 2020, : 2465 - 2470
  • [7] Characterizations and Analyses of Large-Area a-Si:H/μc-Si:H Thin-Film Solar Modules for Efficiency Optimization
    Gau, S. C.
    [J]. IEEE JOURNAL OF PHOTOVOLTAICS, 2013, 3 (01): : 72 - 76
  • [8] Large-area and high efficiency a-Si/poly-Si stacked solar cell submodule
    Yamamoto, K
    Yoshimi, M
    Suzuki, T
    Nakata, T
    Sawada, T
    Nakajima, A
    Hayashi, K
    [J]. CONFERENCE RECORD OF THE TWENTY-EIGHTH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE - 2000, 2000, : 1428 - 1432
  • [9] Performance of a-Si thin film PV modules with and without water flow: An experimental validation
    Gaur, Ankita
    Tiwari, G. N.
    [J]. APPLIED ENERGY, 2014, 128 : 184 - 191
  • [10] LARGE-AREA IMAGING a-Si/MoS2 photodetector has faster photoresponse
    Wallace, John
    [J]. LASER FOCUS WORLD, 2013, 49 (09): : 26 - 27
12345