Formation of nitride film on amorphous ribbon using chemical vapor deposition

被引：0
|
作者：
Han, Jun-Hyun [1 ]
Kim, Tae-Hoon
Yoon, Jin-Kook
Jee, Kwang-Koo
Kim, Kwang-Yoon
机构：
[1] Korea Inst Sci & Technol, Div Engn & Mat Sci, Seoul 136791, South Korea
[2] Korea Univ, Div Engn & Mat Sci, Seoul 136701, South Korea
来源：
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING | 2007年 / 449卷
关键词：
nitride; CVD (chemical vapor deposition); amorphous; magnetic core;
D O I：
10.1016/j.msea.2006.02.321
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Nitride film was deposited on amorphous ribbon using chemical vapor deposition (CVD) to increase skin resistivity of the amorphous ribbon. As-cast Fe73.5Si15.5B7Cu1Nb3 amorphous ribbon was heat-treated in NH3 atmosphere to deposit nitride film on the ribbon at temperatures ranging 773-873 K. The effect of not only NH3 atmosphere but also pre-existing thin oxide film on the surface of as-cast amorphous ribbon on the formation of nitride film was investigated. Thin nitride film of Fe-nitride and Si-nitride were created on the surface of ribbon through the nitriding process. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码：741 / 746
页数：6
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