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- [42] Permeability and corrosion in ZrO2/Al2O3 nanolaminate and Al2O3 thin films grown by atomic layer deposition on polymers JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2012, 30 (04):
- [44] Effects of an Al2O3 capping layer on La2O3 deposited by remote plasma atomic layer deposition Journal of Materials Research, 2010, 25 : 1898 - 1903