Determination of the plastic behavior of low thermal expansion glass at the nanometer scale

被引：0

作者：

Tejeda, R ^{[1
]}

Engelstad, R ^{[1
]}

Lovell, E ^{[1
]}

Anderson, A ^{[1
]}

Yang, DH ^{[1
]}

Blaedel, K ^{[1
]}

机构：

[1] Univ Wisconsin, Computat Mech Ctr, Madison, WI 53706 USA

来源：

SPATIALLY RESOLVED CHARACTERIZATION OF LOCAL PHENOMENA IN MATERIALS AND NANOSTRUCTURES | 2003年 / 738卷

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The nanometer-scale plastic behavior of two low thermal expansion glasses (ULE(R) and Zerodur(R)) was determined through a combination of nanoindentation experiments and finite element modeling. The finite element models were then extended to investigate aspects of the performance of these materials as extreme ultraviolet lithography reticles.

引用

页码：413 / 418

页数：6

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