Ultrasensitive Flexible Temperature-Mechanical Dual-Parameter Sensor Based on Vanadium Dioxide Films

Flexible temperature and mechanical sensing capabilities are of great importance in the artificial intelligence. Here, we report a skin conformable, high sensitive temperature-mechanical dual-parameter sensor based on a PET/vanadium dioxide (VO2)/PDMS multilayer structure fabricated using the transfer printing technique. The ultrahigh mechanical sensitivity to strains in the range of 0%-0.1% with a gauge factor over 400 was attributed to the disconnection-reconnection process of the ziplike nanoscale cracks under strain or vibration. And the enhanced temperature sensing performance with a resolution of 0.1 K was attributed to the high temperature coefficient of resistance of VO2 material. The temperature and the mechanical signals simultaneously recorded in the electrical resistance signal were separated via fast Fourier transform (FFT) and inverse FFT. The flexibility and ultra-sensitivity to temperature and vibration make the sensor a promising application in advanced artificial intelligence.