Thermal modeling and compensation of MEMS accelerometer

被引：5
|
作者：
Ma, Lin [1 ,2 ]
Chen, Wanwan [1 ,2 ,3 ]
Li, Bin [1 ,2 ]
Chen, Zhigang [3 ]
You, Zheng [1 ,2 ]
机构：
[1] Tsinghua Univ, Dept Precis Instrument, Beijing 100084, Peoples R China
[2] Tsinghua Univ, State Key Lab Precis Measurement Technol & Instru, Beijing 100084, Peoples R China
[3] North Univ China, Natl Def Key Lab Underground Damage Technol, Taiyuan 030051, Peoples R China
来源：
MECHANICAL COMPONENTS AND CONTROL ENGINEERING III | 2014年 / 668-669卷
关键词：
MEMS; inertial measurement unit; temperature character; bias; compensation;
D O I：
10.4028/www.scientific.net/AMM.668-669.1015
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
As for MEMS Micro machined accelerometer, biases characteristic always varies with temperature fluctuations. Through establishing the error model between the MEMS accelerometer biases and the temperature variation in the temperature range of -20 degrees C similar to 60 degrees C, studying on the bias changed with thermal variation of MEMS accelerometer, and the test results show that MEMS accelerometer bias caused by temperature change have decreased from more than 5mg to lessen than 1mg before and after compensation. Also based on the temperature error model of the MEMS accelerometer bias in static and dynamic condition, the whole temperature characteristics have been improved to some extent, which would improve the precision in the inertial navigation systems.
引用
收藏
页码：1015 / +
页数：2
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