Laser microfabrication of three-dimensional photonic crystal templates in polymers

被引：3
|
作者：
Mizeikis, V [1 ]
Seet, KK [1 ]
Juodkazis, S [1 ]
Misawa, H [1 ]
机构：
[1] Hokkaido Univ, Inst Elect Sci, JST, CREST, Sapporo, Hokkaido 0600812, Japan
来源：
FIFTH INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION | 2004年 / 5662卷
关键词：
photonic crystal; laser microfabrication; photonic band gap; optical properties;
D O I：
10.1117/12.595880
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Three-dimensional woodpile photonic crystal structures were recorded in films of polymeric photoresists polymethylcrylate (PMMA) and SU-8 films by femtosecond laser microfabrication technique. The fabricated structures consist of periodic arrays of extended elliptical 'void-channels in PMMA, and of solid elliptical rods of cross-linked polymer in SU-8. Their lattice periods of several micrometers and typical sub-micrometric feature sizes allowed to confirm presence of pronounced photonic stop-bands at infrared wavelengths around 2.0-8.0 mum.
引用
收藏
页码：95 / 100
页数：6
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