Fresnel zone plate stacking in the intermediate field for high efficiency focusing in the hard X-ray regime

被引：21

作者：

Gleber, Sophie-Charlotte ^{[1
]}

Wojcik, Michael ^{[1
]}

Liu, Jie ^{[1
]}

Roehrig, Chris ^{[1
]}

Cummings, Marvin ^{[1
]}

Vila-Comamala, Joan ^{[1
]}

Li, Kenan ^{[2
]}

Lai, Barry ^{[1
]}

Shu, Deming ^{[1
]}

Vogt, Stefan ^{[1
]}

机构：

[1] Argonne Natl Lab, Argonne, IL 60439 USA

[2] Northwestern Univ, Evanston, IL 60208 USA

来源：

OPTICS EXPRESS | 2014年 / 22卷 / 23期

关键词：

RESOLUTION; MICROSCOPY; OPTICS;

D O I：

10.1364/OE.22.028142

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Focusing efficiency of Fresnel zone plates (FZPs) for X-rays depends on zone height, while the achievable spatial resolution depends on the width of the finest zones. FZPs with optimal efficiency and sub-100-nm spatial resolution require high aspect ratio structures which are difficult to fabricate with current technology especially for the hard X-ray regime. A possible solution is to stack several zone plates. To increase the number of FZPs within one stack, we first demonstrate intermediate-field stacking and apply this method by stacks of up to five FZPs with adjusted diameters. Approaching the respective optimum zone height, we maximized efficiencies for high resolution focusing at three different energies, 10, 11.8, and 25 keV. (C)2014 Optical Society of America

引用

页码：28142 / 28153

页数：12

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