Glass Monocapillary X-ray Optics And Their Applications In X-ray Microscopy

Elliptical, parabolic and Wolter type glass monocapillaries were fabricated for use as x-ray condensers in the energy range of 250 eV to 20 keV. On a routine basis a diameter error of +/-0.4 mu m and straightness error of 0.8 mu m (peak to valley) can be reached. The final test of condensers was performed at-wavelength by imaging the far field x-ray reflection intensity distribution using a laboratory microfocus x-ray source. For medium length condensers with a total length <80mm, a total slope error of 40 mu rad rms was obtained. The applications in full-field x-ray microscopes and the future effort in developing capillary Wolter mirrors based on this technology are reported.