OPTIMIZATION OF MICROWAVE POWER TRANSFER FROM ELECTRIC FIELD TO THE PLASMA INSIDE AN MICROWAVE 915 MHz PLASMA SOURCE

被引：0

作者：

Miotk, R. ^{[1
]}

Jasinski, M. ^{[1
]}

Mizeraczyk, J. ^{[2
]}

机构：

[1] Polish Acad Sci, Szewalski Inst Fluid Flow Machinery, Gdansk, Poland

[2] Gdynia Maritime Univ, Gdynia, Poland

来源：

2016 INTERNATIONAL CONFERENCE ON ACTUAL PROBLEMS OF ELECTRON DEVICES ENGINEERING (APEDE), VOL 1 | 2016年

关键词：

DECOMPOSITION;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents an optimization of the waveguide-supplied coaxial-line-based nozzleless microwave plasma source. This field applicator operated at a frequency f equal to 915 MHz at an atmospheric pressure. The optimization objective was to maximize an efficiency of power transfer from electric field to plasma inside this device. In the optimization we used a model of plasma which was determined in this work.

引用

页数：8

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