共 50 条
- [42] TRENDS IN WAFER FAB, AND THEIR DRIVING ECONOMIC FORCES [J]. SOLID STATE TECHNOLOGY, 1983, 26 (08) : 173 - 180
- [43] TCAD - WILL THE VIRTUAL WAFER FAB BECOME REALITY [J]. IEEE CIRCUITS AND DEVICES MAGAZINE, 1994, 10 (05): : 7 - 7
- [47] Wafer fab mask qualification tecbniques and limitations [J]. Photomask Technology 2006, Pts 1 and 2, 2006, 6349 : U281 - U292
- [49] Strategies for water reclamation at an advanced wafer fab [J]. SPWCC '97 - THE 16TH ANNUAL SEMICONDUCTOR PURE WATER AND CHEMICALS CONFERENCE, 1997 PROCEEDINGS, VOL II, 1997, : 167 - 179