Developing silicon strip detectors with a large-scale commercial foundry

被引：1

作者：

Koenig, A. ^{[1
]}

Bartl, U. ^{[2
]}

Bergauer, T. ^{[1
]}

Dragicevic, M. ^{[1
]}

Hacker, J. ^{[2
]}

Treberspurg, W. ^{[1
]}

机构：

[1] Austrian Acad Sci, Inst High Energy Phys, A-1010 Vienna, Austria

[2] Infineon Technol Austria AG, Villach, Austria

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2016年 / 824卷

关键词：

Tracking detectors; Silicon strip sensors; Solid state detectors; Semiconductor production;

D O I：

10.1016/j.nima.2015.09.005

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Since 2009 the Institute of High Energy Physics (HEPHY) in Vienna is developing a production process for planar silicon strip sensors on 6-in. wafers together with the semiconductor manufacturer Infineon Technologies. Four runs with several batches of wafers, each comprising six different sensors, were manufactured and characterized. A brief summary of the recently completed 6-in. campaign is given. Milestones in sensor development as well as techniques to improve the sensor quality are discussed. Particular emphasis is placed on a failure causing areas of defective strips which accompanied the whole campaign. Beam tests at different irradiation facilities were conducted to validate the key capability of particle detection. Another major aspect is to prove the radiation hardness of sensors produced by Infineon. Therefore, neutron irradiation studies were performed. (C) 2015 Elsevier B.V. All rights reserved.

引用

页码：419 / 421

页数：3

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