Maskless pattern fabrication on Pyrex 7740 glass surface by using nano-scratch with HF wet etching

被引：18
|
作者：
Youn, SW
Kang, CG
机构：
[1] Pusan Natl Univ, Dept Precis & Mech Engn, Pusan 609735, South Korea
[2] Pusan Natl Univ, Sch Mech Engn, Pusan 609735, South Korea
来源：
SCRIPTA MATERIALIA | 2005年 / 52卷 / 02期
基金：
新加坡国家研究基金会;
关键词：
lithography; nano-scratch test; silicate;
D O I：
10.1016/j.scriptamat.2004.09.016
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Line patterns were machined on borosilicate (Pyrex 7740 glass) surface using the combination of mechanical machining by Nanoindenter(R) XP and HF wet etching, and a etch-mask effect of the affected layer of the nano-scratched Pyrex 7740 glass surface was investigated. (C) 2004 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
引用
收藏
页码：117 / 122
页数：6
相关论文
共 35 条
  • [1] Maskless pattern fabrication on Si(100) surface by using nanoindenter with KOH wet etching
    Youn, SW
    Kang, CG
    SCRIPTA MATERIALIA, 2004, 50 (01) : 105 - 109
  • [2] Fabrication of Micro via-hole by Wet Etching of Pyrex Glass
    Jia, Shixing
    Zhang, Long
    Zhu, Jian
    MICRO AND NANO TECHNOLOGY: 1ST INTERNATIONAL CONFERENCE OF CHINESE SOCIETY OF MICRO/NANO TECHNOLOGY(CSMNT), 2009, 60-61 : 303 - 306
  • [3] Material Removal Mechanism and Sub-surface Cracking in Quartz Glass Based on Nano-scratch
    Guo, Jiale
    Yi, Hao
    Zhu, Limin
    Sun, Yuli
    Zuo, Dunwen
    Surface Technology, 2024, 53 (16): : 151 - 158
  • [4] Etching mask effect of the nanoscratched borosilicate surface and its application to maskless pattern fabrication
    Youn, SW
    Kang, CG
    PRICM 5: THE FIFTH PACIFIC RIM INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS AND PROCESSING, PTS 1-5, 2005, 475-479 : 3479 - 3482
  • [5] Defect-free wet etching through pyrex glass using Cr/Au mask
    Tay, Francis E. H.
    Iliescu, Ciprian
    Jing, Ji
    Miao, Jianmin
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2006, 12 (10-11): : 935 - 939
  • [6] Defect-free wet etching through pyrex glass using Cr/Au mask
    Francis E. H. Tay
    Ciprian Iliescu
    Ji Jing
    Jianmin Miao
    Microsystem Technologies, 2006, 12 : 935 - 939
  • [7] Imprint template fabrication based on glass wet etching using a soft etching mask
    Wang, QD
    Duan, YG
    Lu, BH
    Ding, YC
    Tang, YP
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2006, 16 (03) : 564 - 570
  • [8] Fabrication of micro-structure on glass surface using micro-indentation and wet etching process
    Saito, Yasuhiro
    Okamoto, Shinya
    Miki, Atsushi
    Inomata, Hiroyuki
    Hidaka, Takeshi
    Kasai, Hiroaki
    APPLIED SURFACE SCIENCE, 2008, 254 (22) : 7243 - 7249
  • [9] Rapid and maskless nanopatterning of aluminosilicate glass surface via friction-induced selective etching in HF solution
    Song, Chenfei
    Yu, Bingjun
    Wang, Mian
    Qian, Linmao
    RSC ADVANCES, 2015, 5 (97): : 79964 - 79968
  • [10] Fabrication of Si nano-wires using anisotropic dry and wet etching
    Normand, P
    Tsoukalas, D
    Aidinis, C
    Tserepi, A
    Kouvatsos, D
    Kapetanakis, E
    MICROELECTRONIC ENGINEERING, 1998, 42 : 551 - 554
1234