Polyimide-derived laser-induced porous graphene-incorporated microwave resonator for high-performance humidity sensing

被引：29

作者：

Adhikari, Kishor Kumar ^{[1
]}

Wang, Cong ^{[1
]}

Qiang, Tian ^{[1
]}

Wu, Qun ^{[1
]}

机构：

[1] Harbin Inst Technol, Harbin 150001, Heilongjiang, Peoples R China

来源：

APPLIED PHYSICS EXPRESS | 2019年 / 12卷 / 10期

基金：

中国国家自然科学基金; 中国博士后科学基金;

关键词：

SENSORS; RESPIRATION; WATER;

D O I：

10.7567/1882-0786/ab3c7a

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Bulk absorption-based microwave humidity sensing characteristics of a laser-induced graphene (LIG) is investigated for the first time. An LIG flake with a 3D network of high-porosity patterned on a polyimide substrate using CO2 microlaser is integrated into the capacitive sensing region of a 1.985 GHz microwave resonator. The performance evaluation reveals that the developed microwave-LIG sensor linearly detects the wide range of relative humidity (10%-95% RH) with a high sensitivity, short response and recovery times (< 6 s), and small hysteresis (up to 0.375% RH); thus validating the high-performance intrinsic humidity sensing characteristics of LIG at microwave regime. (C) 2019 The Japan Society of Applied Physics

引用

页数：5

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