Fabrication and characterization of anodic aluminum oxide template

被引:107
|
作者
Wang, X [1 ]
Han, GR [1 ]
机构
[1] Zhejiang Univ, State Key Lab Silicon Mat, Dept Mat Sci & Engn, Zhengzhou 310027, Peoples R China
关键词
AAO template; pore-widening time; AFM;
D O I
10.1016/S0167-9317(03)00042-X
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, anodic aluminum oxide (AAO) templates were fabricated using a two-step oxidization method, pore-widening was then fulfilled in 5 wt% phosphoric acid at 37 degreesC. The AAO template prepared under 40 V constant potential presents the optimum ordering. The pore diameter and spacing are proportional to the forming voltage, which is due to the alternative migration velocity of reactive ions under electric field according to the growth-dissolution model. Further pore adjustment depends on the time of pore-widening in phosphoric acid. The characterization of the AAO template was measured by atomic force microscopy (AFM) and X-ray diffraction (XRD). (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:166 / 170
页数:5
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