The chemical-mechanical polishing (CMP) process on the Nd-doped phosphate glass

被引：0
|
作者：
Zhang, B. A. [1 ]
Zhu, J. Q. [1 ]
Bao, L. [1 ]
机构：
[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China
来源：
ADVANCES IN ABRASIVE MACHINING AND SURFACING TECHNOLOGIES, PROCEEDINGS | 2006年
关键词：
laser glass; chemical mechanical polishing; subsurface; optical manufacturing;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The chemical-mechanical polishing process is one of the most efficient techniques in polishing high quality laser glass. This paper discusses the polishing characteristics of Neodymium phosphate laser glass on its chemical components and chemical properties. The effects of the agent particle size, pH, chemical additives, as well as the subsurface damage are discussed at the same time. From the surface physics and chemistry theory, the causes of hazes and eroded in laser glass surface are explained.
引用
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页码：329 / +
页数：3
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