共 50 条
- [22] Design and Testing of a Damped Piezo-Driven Decoupled XYZ Stage 2021 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION (ICRA 2021), 2021, : 6986 - 6991
- [23] Optimal design of a new structure piezo-driven cell injector 2014 IEEE 14TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO), 2014, : 525 - 530
- [24] Application of Self-sensing Technique for Position Control Considering Vibration Suppression in Piezo-driven Stage 2015 IEEE INTERNATIONAL CONFERENCE ON MECHATRONICS (ICM), 2015, : 278 - 283
- [25] Composite Filter Design and Application to Piezo-driven Stage Systems 2016 IEEE 14TH INTERNATIONAL WORKSHOP ON ADVANCED MOTION CONTROL (AMC), 2016, : 227 - 232
- [27] Mirror design for piezo-driven mechanical devices: Modeling and simulations International Journal of Precision Engineering and Manufacturing, 2012, 13 : 1439 - 1443
- [28] PRECISION X-Y-STAGE WITH A PIEZO-DRIVEN FINE-TABLE BULLETIN OF THE JAPAN SOCIETY OF PRECISION ENGINEERING, 1988, 22 (01): : 13 - 17
- [29] Design and Control of Piezo-driven Planar 3-DOFs Fully Decoupled Compliant Platform 2024 IEEE INTERNATIONAL CONFERENCE ON CYBERNETICS AND INTELLIGENT SYSTEMS, CIS AND IEEE INTERNATIONAL CONFERENCE ON ROBOTICS, AUTOMATION AND MECHATRONICS, RAM, CIS-RAM 2024, 2024, : 273 - 278