NANOSTRUCTURING SOLID SURFACES WITH FEMTOSECOND LASER IRRADIATIONS FOR APPLICATIONS

被引:5
|
作者
Shen, Mengyan [1 ,2 ]
机构
[1] Univ Massachusetts, Dept Phys & Appl Phys, Lowell, MA 01854 USA
[2] Univ Massachusetts, Nanomfg Ctr, Lowell, MA 01854 USA
来源
MODERN PHYSICS LETTERS B | 2010年 / 24卷 / 03期
关键词
Femtosecond laser; nanostructure; sensing; artificial; photosynthesis; soft nanolithography; FISCHER-TROPSCH SYNTHESIS; REGULAR ARRAYS; SILICON; WATER; MASKS; GAAS; SI;
D O I
10.1142/S0217984910022457
中图分类号
O59 [应用物理学];
学科分类号
摘要
Pulsed laser-assisted etching is a simple but effective method for fabricating small regular structures directly on to a surface. We have successfully fabricated submicro- or nano-meter sized spikes on a solid surface immersed in liquids with femtosecond laser pulse irradiations. This method is applicable to different metals such as stainless steel, copper, titanium, cobalt, as well as different semiconductors, such as Si and GaAs. The femtosecond laser method is much faster than other methods. We can control the experimental conditions to design and fabricate nanostructures in different materials and on the surfaces with different morphologies. Here, we discuss the nanostructures formation with femtosecond pulse laser irradiations, and introduce our results of the nanostructure for applications in sensing, biology and artificial photosynthesis. The femtosecond laser irradiation technique can efficiently integrate metal, semiconductor and polymer nanostructures in various small devices to leverage the expertise in other research fields and applications.
引用
收藏
页码:257 / 269
页数:13
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