Verification and in situ calibration of large-aperture null correctors for convex aspheric mirrors

被引:7
|
作者
Xue, Shuai
Chen, Shanyong [1 ]
Tian, Ye
Lu, Jinfeng
Hu, Hao
机构
[1] Natl Univ Def Technol, Coll Mechatron Engn & Automat, 47 Yanzheng St, Changsha 410073, Hunan, Peoples R China
关键词
Convex mirrors; Calibration; Null test; Surface metrology; COMPUTER-GENERATED HOLOGRAMS; 3-FLAT TEST; ZERNIKE POLYNOMIALS; HYPERBOLIC MIRRORS; ABSOLUTE PLANARITY; STITCHING METHODS; SHIFT-ROTATION; PLATES; SURFACES; CERTIFICATION;
D O I
10.1016/j.measurement.2017.04.033
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Interferometric test of large convex aspheres with high accuracy is still an urgent problem. Adopting a large-aperture null corrector is usually inevitable, and it is imperative to certify the large-aperture null optics in case incorrect final shape of the aspheric mirror is obtained. Moreover, it is necessary to calibrate and remove errors of the large-aperture null lens and trace errors to surfaces that are easy to obtain high accuracy. For these purpose, this paper presents an in situ calibrated null test method. The large aperture null corrector for convex aspheric mirror is verified and calibrated by a wisely designed small aperture certifying null whose surfaces are either flat or spherical which are easy to be fabricated, measured and assembled. A redundant test is implemented by a Zygo VeriFire Asphere interferometer for cross test. Compared with existing methods of certificating null correctors which utilize an expensive CGH or a self-aligning aspherical mirror, the presented method finally traces errors of a large-aperture null corrector to small aperture flat and spherical surfaces thus costs are expected to be saved dramatically. (C) 2017 Elsevier Ltd. All rights reserved.
引用
收藏
页码:79 / 87
页数:9
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