Patterning of silicone rubber for micro-electrode array fabrication

被引：15

作者：

Schuettler, Martin ^{[1
]}

Henle, Christian ^{[1
]}

Ordonez, Juan ^{[1
]}

Suaning, Gregg J. ^{[2
,4
]}

Lovell, Nigel H. ^{[3
,4
]}

Stieglitz, Thomas ^{[1
]}

机构：

[1] Univ Freiburg, Dept Microsyst Engn, Lab Biomed Microtechnol, Georges Koehler Allee 102, D-79110 Freiburg, Germany

[2] Univ Newcastle, Sch Engn, Callaghan, NSW 2308, Australia

[3] NICTA, Eveleigh, NSW 1430, Australia

[4] Univ New South Wales, Grad Sch Biomed Engn, Sydney, NSW 2052, Australia

来源：

2007 3RD INTERNATIONAL IEEE/EMBS CONFERENCE ON NEURAL ENGINEERING, VOLS 1 AND 2 | 2007年

关键词：

D O I：

10.1109/CNE.2007.369610

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Five methods of micro-patterning silicone rubber, (polydimethylsiloxane, PDMS) are reviewed. Three of the methods are experimentally evaluated in order to find the most suitable process parameters to expose electrode sites and contact pads of PDMS-embedded platinum structures for fabricating micro-electrode arrays. Rated by applicability, type of PDMS involved (implantable-grade required), achievable aspect ratio (AR) and minimum feature size (FS), the feasibility of two methods was demonstrated: laser-ablation, using a Nd:YAG laser (AR = 5.3, FS > 100 mu m) and dry etching using a reactive ion etcher (AR = 10, FS > 10 mu m).

引用

页码：53 / +

页数：2

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