Patterning of silicone rubber for micro-electrode array fabrication

被引：15

作者：

Schuettler, Martin ^{[1
]}

Henle, Christian ^{[1
]}

Ordonez, Juan ^{[1
]}

Suaning, Gregg J. ^{[2
,4
]}

Lovell, Nigel H. ^{[3
,4
]}

Stieglitz, Thomas ^{[1
]}

机构：

[1] Univ Freiburg, Dept Microsyst Engn, Lab Biomed Microtechnol, Georges Koehler Allee 102, D-79110 Freiburg, Germany

[2] Univ Newcastle, Sch Engn, Callaghan, NSW 2308, Australia

[3] NICTA, Eveleigh, NSW 1430, Australia

[4] Univ New South Wales, Grad Sch Biomed Engn, Sydney, NSW 2052, Australia

来源：

2007 3RD INTERNATIONAL IEEE/EMBS CONFERENCE ON NEURAL ENGINEERING, VOLS 1 AND 2 | 2007年

关键词：

D O I：

10.1109/CNE.2007.369610

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Five methods of micro-patterning silicone rubber, (polydimethylsiloxane, PDMS) are reviewed. Three of the methods are experimentally evaluated in order to find the most suitable process parameters to expose electrode sites and contact pads of PDMS-embedded platinum structures for fabricating micro-electrode arrays. Rated by applicability, type of PDMS involved (implantable-grade required), achievable aspect ratio (AR) and minimum feature size (FS), the feasibility of two methods was demonstrated: laser-ablation, using a Nd:YAG laser (AR = 5.3, FS > 100 mu m) and dry etching using a reactive ion etcher (AR = 10, FS > 10 mu m).

引用

页码：53 / +

页数：2

共 50 条

[1] Stretchable micro-electrode array
Maghribi, M
Hamilton, J
Polla, D
Rose, K
Wilson, T
Krulevitch, P
2ND ANNUAL INTERNATIONAL IEEE-EMBS SPECIAL TOPIC CONFERENCE ON MICROTECHNOLOGIES IN MEDICINE & BIOLOGY, PROCEEDINGS, 2002, : 80 - 83
[2] MICRO-ELECTRODE ARRAY AND MICRO-HOLE ARRAY FABRICATION BY COMBINED MICRO-WEDM AND EMM
Zeng, Weiliang
Wang, Zhenlong
Weng, Minghao
Liu, Ying
DIGEST JOURNAL OF NANOMATERIALS AND BIOSTRUCTURES, 2012, 7 (02) : 755 - 761
[3] Carbon nanotube micro-electrode array
Gabay, T.
Ben-David, M.
Kalifa, I.
Abrams, Z. R.
Sorkin, R.
Ben-Jacob, E.
Hanein, Y.
TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2007,
[4] TANTALUM ON SAPPHIRE MICRO-ELECTRODE ARRAY
MAY, GA
SHAMMA, SA
WHITE, RL
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (12) : 1932 - 1939
[5] Synchronization of neurons in micro-electrode array cultures
F. Esposti
M. G. Signorini
The European Physical Journal Special Topics, 2008, 165 : 129 - 135
[6] Fabrication of micro-electrode arrays for biotechnological applications
Green, NG
Morgan, H
Monaghan, W
Robertson, M
MICROELECTRONIC ENGINEERING, 1999, 46 (1-4) : 397 - 400
[7] A STRETCHABLE MICRO-ELECTRODE ARRAY FOR IN VITRO ELECTROPHYSIOLOGY
Pakazad, S. Khoshfetrat
Savov, A. M.
van de Stolpe, A.
Braam, S.
van Meer, B.
Dekker, R.
2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2011, : 829 - 832
[8] Synchronization of neurons in micro-electrode array cultures
Esposti, F.
Signorini, M. G.
EUROPEAN PHYSICAL JOURNAL-SPECIAL TOPICS, 2008, 165 (1): : 129 - 135
[9] Micro-Electrode Fabrication Process Using EDM
Hourmand, M.
Noordin, M. Y.
MATERIALS, INDUSTRIAL, AND MANUFACTURING ENGINEERING RESEARCH ADVANCES 1.1, 2014, 845 : 980 - 984
[10] Experimental study of micro-electrode array by micro-WEDM
School of Mechanical Engineering, Harbin Institute of Technology, Harbin, China
不详
Key Eng Mat, (274-278):

← 1 2 3 4 5 →