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Ultralow loss ring resonators using 3.5% index-contrast Ge-doped silica waveguides
被引:16
|作者:
Bourdon, G
[1
]
Alibert, G
[1
]
Béguin, A
[1
]
Bellman, B
[1
]
Guiot, E
[1
]
机构:
[1] Corning SA, F-77210 Avon, France
关键词:
germanium;
optical losses;
optical strip waveguides;
resonator filters;
waveguide nebds;
wavelength-division multiplexing;
D O I:
10.1109/LPT.2003.809925
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
Ring resonators (RRs) with a round-trip loss below 0.1 dB and a maximum free-spectral range (FSR) of 62.7 GHz were successfully fabricated. Single-mode waveguides of essentially square cross sections (similar to2.6 x 2.8 mum(2)) were patterned through reactive ion etching on a core layer of high Ge content doped silica deposited using plasma-enhanced chemical vapor deposition; they received a silica overclad. A propagation loss of 0.085 dB/cm was recorded for these waveguides. We strongly believe that our technology makes it possible to fabricate equally ultralow-loss RRs of even smaller bending radius, reaching an FSR of 100 GHz, thus opening, the way to the design of filters for wavelength-division-multiplexing systems.
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页码:709 / 711
页数:3
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