Preparation of TiO2 thin films by modified spin-coating method using an aqueous precursor

被引：35

作者：

Patil, KR ^{[1
]}

Sathaye, SD ^{[1
]}

Khollam, YB ^{[1
]}

Deshpande, SB ^{[1
]}

Pawaskar, NR ^{[1
]}

Mandale, AB ^{[1
]}

机构：

[1] Natl Chem Lab, Div Chem Engn, Pune 411008, Maharashtra, India

来源：

MATERIALS LETTERS | 2003年 / 57卷 / 12期

关键词：

thin films; spin coating; titanium dioxide; electron spectroscopy;

D O I：

10.1016/S0167-577X(02)01067-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Modified spin-coating method has been applied to grow thin films of titanium dioxide. With this modification, it is possible to use ammonium titanyl oxalate in the form of its aqueous solutions as starting material. The resulting thin films are characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), UV-visible spectroscopy and X-ray photoelectron spectroscopy (XPS). The results show that aqueous precursor form anatase TiO2 thin films, which are qualitatively comparable to the films grown by other wet chemical techniques. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：1775 / 1780

页数：6

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