Analysis of nonlinearity in a high-resolution grating interferometer

被引：25
|
作者：
Lin, DJ [1 ]
Jiang, H [1 ]
Yin, CY [1 ]
机构：
[1] Tsing Hua Univ, Dept Precis Instruments & Mechanol, State Key Lab Precis Measurement Technol & Instru, Beijing 100084, Peoples R China
来源：
OPTICS AND LASER TECHNOLOGY | 2000年 / 32卷 / 02期
基金：
中国国家自然科学基金;
关键词：
grating; interferometer; nonlinearity; calibration; depolarization;
D O I：
10.1016/S0030-3992(00)00022-0
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Metrological feasibilities of a high-resolution grating interferometer (GI) based on a transverse Zeeman laser are investigated. When the grating pitch equals 20 mu m, a resolution of 0.7 nm is obtained by means of a heterodyne signal processing method. The comparison of two approaches for determining the residual nonlinearity is presented. One is to evaluate the maximum residual error by determining the amplitude modulation degree of the measurement signal. The other is to do a high precision calibration with a differential dual-frequency interferometer that has a higher precision. The experimental results show that the nonlinearity is no more than 25 nm which fits well with the estimating result. Analysis of the depolarization effect of the grating indicates that it has little influence on the measurement accuracy. (C) 2000 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码：95 / 99
页数：5
相关论文
共 50 条
  • [1] Analysis of tolerances in a grating interferometer for high-resolution displacement measurement
    Dobosz, M
    [J]. INTERFEROMETRY '99: TECHNIQUES AND TECHNOLOGIES, 1999, 3744 : 253 - 261
  • [2] INTERFEROMETER-GRATING SPECTROGRAPH FOR HIGH-RESOLUTION ASTRONOMICAL SPECTROSCOPY IN MIDDLE UV
    BATES, B
    MCCARTNEY, DJ
    MCKEITH, CD
    MCQUOID, A
    SPROULE, OE
    [J]. APPLIED OPTICS, 1978, 17 (13): : 2119 - 2124
  • [3] A HIGH-RESOLUTION FAR INFRARED DOUBLE-BEAM LAMELLAR GRATING INTERFEROMETER
    HALL, RT
    VRABEC, D
    DOWLING, JM
    [J]. APPLIED OPTICS, 1966, 5 (07): : 1147 - &
  • [4] A high-resolution displacement sensor based on a grating interferometer with the phase modulation technique
    Zhao, Shuangshuang
    Hou, Changlun
    Zhang, Juan
    Bai, Jian
    Yang, Guoguang
    [J]. MEASUREMENT SCIENCE AND TECHNOLOGY, 2012, 23 (10)
  • [5] High-resolution grating interferometer for phase-contrast imaging at PETRA III
    Hipp, A.
    Moosmann, J.
    Herzen, J.
    Hammel, J. U.
    Schreyer, A.
    Beckmann, F.
    [J]. DEVELOPMENTS IN X-RAY TOMOGRAPHY XI, 2017, 10391
  • [6] Application of a focused laser beam in a grating interferometer for high-resolution displacement measurements
    Dobosz, M
    [J]. OPTICAL ENGINEERING, 1999, 38 (06) : 958 - 967
  • [7] A PRACTICAL HIGH-RESOLUTION INTERFEROMETER
    VERNACCHIA, MA
    STRODTMAN, SL
    BODINE, MM
    REIN, DB
    [J]. LASER FOCUS WITH FIBEROPTIC TECHNOLOGY, 1982, 18 (05): : 73 - &
  • [8] HIGH-RESOLUTION GRATING SPECTROMETER
    PORTO, SPS
    SZULE, A
    GUIMARAES, WON
    NETO, JRP
    [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1960, 50 (09) : 921 - 922
  • [9] High-Resolution X-Ray Phase-Contrast Imaging with a Grating Interferometer
    Lee, Seung Wook
    Kim, Youngju
    Lee, Seho
    Oh, Ohsung
    Xi, Yan
    Yang, Qingsong
    Cong, Wenxiang
    Wang, Ge
    [J]. JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2017, 71 (09) : 538 - 542
  • [10] APPLICATION OF A DIVERGENT LASER-BEAM IN A GRATING INTERFEROMETER FOR HIGH-RESOLUTION DISPLACEMENT MEASUREMENTS
    DOBOSZ, M
    [J]. OPTICAL ENGINEERING, 1994, 33 (03) : 897 - 901
12345