A high-resolution displacement sensor based on a grating interferometer with the phase modulation technique

被引：18
|
作者：
Zhao, Shuangshuang [1 ]
Hou, Changlun [1 ]
Zhang, Juan [1 ]
Bai, Jian [1 ]
Yang, Guoguang [1 ]
机构：
[1] Zhejiang Univ, State Key Lab Modern Opt Instrumentat, Hangzhou 310027, Zhejiang, Peoples R China
来源：
MEASUREMENT SCIENCE AND TECHNOLOGY | 2012年 / 23卷 / 10期
基金：
中国国家自然科学基金;
关键词：
displacement sensor; grating interferometer; phase modulation technology (PMT); ACCURACY;
D O I：
10.1088/0957-0233/23/10/105102
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A high-resolution displacement sensor based on a grating interferometer with the phase modulation technique is demonstrated in this paper. The grating interferometer is formed with a grating and a mirror, which is fixed on a piezoelectric translator to generate phase modulation. The detected signal is intensity-modulated and processed with a lock-in amplifier for demodulation. Experimental results show that this displacement sensor has a displacement sensitivity of 19.8 mV nm(-1) and a high-resolution displacement detection of 0.05 nm in the linear region.
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收藏
页数：6
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