Scanless Profilometry by means of VIPA Installed Optical Interferometer

被引：0
|
作者：
Morisaki, Takashi [1 ]
Ono, Hiroshi [1 ]
Shioda, Tatsutoshi [1 ]
机构：
[1] Nagaoka Univ Technol, Dept Elect Engn, Niigata 9402188, Japan
来源：
2009 LASERS & ELECTRO-OPTICS & THE PACIFIC RIM CONFERENCE ON LASERS AND ELECTRO-OPTICS, VOLS 1 AND 2 | 2009年
关键词：
VIPA; optical interferometer; optical frequency comb; profilometry; TOMOGRAPHY;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A VIPA installed optical interferometer for scanless profilometry is proposed by displaying the applied delay time to a line-image sensor The delay time was carried on spatially separated combs generated by the VIPA
引用
收藏
页码：1231 / 1232
页数：2
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