Development of an incoherent optical frequency comb interferometer for long-range and scanless profilometry and tomography

被引：11

作者：

Tuan Quoc Banh ^{[1
]}

Suzuki, Kohei ^{[1
]}

Shioda, Tatsutoshi ^{[1
]}

机构：

[1] Nagaoka Univ Technol, Dept Elect Engn, Nagaoka, Niigata 9402188, Japan

来源：

OPTICS COMMUNICATIONS | 2013年 / 296卷

关键词：

Incoherent comb interferometer; Scanless measurement; Tomography; Profilometry; SPATIAL PHASE MODULATOR; SINGLE-SHOT TOMOGRAPHY; COHERENCE TOMOGRAPHY;

D O I：

10.1016/j.optcom.2013.01.027

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

An optical resonator was installed as an incoherent frequency comb generator into a two-dimensional single-shot profilometry and tomography system to increase the measurement range up to 30 times compared with a conventional white-light interferometer. The dynamic range of the sample set position was experimentally confirmed to be similar to 28 mm, equivalent to the coherency of the resonator. Scanless measurement can be achieved through high-order comb interference. In this study, we demonstrated tomography with a resolution of similar to 11 mu m and effective high-order interference fringe discrimination. (c) 2013 Elsevier B.V. All rights reserved.

引用

页码：1 / 8

页数：8

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