The four-terminal silicon piezotransducer: History and future

被引：4
|
作者：
Gridchin, AV [1 ]
机构：
[1] Novosibirsk State Tech Univ, Novosibirsk 630090, Russia
来源：
2004 INTERNATIONAL SIBERIAN WORKSHOPS AND TUTORIALS ON ELECTRON DEVICES AND MATERIALS, EDM 2004, PROCEEDINGS | 2004年
关键词：
D O I：
10.1109/PESC.2004.241010
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：21 / 23
页数：3
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