Visible-blind metal-semiconductor-metal structured deep-ultraviolet photodetectors using single-crystalline diamond thin film

被引：0
|
作者：
Liao, Meiyong [1 ]
Koide, Yasuo [1 ]
机构：
[1] Natl Inst Mat Sci, Sensor Mat Ctr, 1-1 Namiki, Tsukuba, Ibaraki 305, Japan
来源：
2006 BIMW: 2006 BEIJING INTERNATIONAL MATERIALS WEEK, PTS 1-4: MAGNESIUM | 2007年 / 546-549卷
关键词：
photodetector; MSM; visible-blind; single-crystalline diamond;
D O I：
10.4028/www.scientific.net/MSF.546-549.1759
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Metal-semiconductor-metal (MSM) planar photodiodes and photoconductors were fabricated on unintentionally doped homoepitaxial diamond thin films deposited on Ib and IIa-type diamond substrated. The MSM photoconductor on the epilayer grown on the Ib-type substrate exhibits the highest discrimination ratio up to 10(8) between 210 rim and visible light and a photocurrent gain around 33 at 220 nm. The persistent photoconductivity is rather week for such kind of photoconductor.
引用
收藏
页码：1759 / +
页数：2
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