Repairing of Pattern Defects on OTFT by Fountain Pen Nano-Lithography

被引:1
|
作者
Onoue, Miki [1 ]
Ogura, Shintaro [1 ]
Ushijima, Hirobumi [1 ]
机构
[1] Adv Ind Sci & Technol, Photon Res Inst, Biophoton Grp, Higashi Ku, Tsukuba, Ibaraki 3058565, Japan
关键词
Nano eNabler; pen-type lithography; silver nanoparticles ink; LIGHT-EMITTING DEVICES;
D O I
10.1080/15421400903584564
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The patterning by Fountain-pen nano-lithography (FPN) with silver nanoparticles ink was reported. The FPN, a kind of pen-type nano-lithography technique, enables on-demand patterning of micro-meter size at wide area. At first, preparation of silver nanoparticles ink and patterning condition by FPN with the ink were investigated. Then the printed wires with disconnection of OTFT were repaired by FPN with the ink. The repaired lines showed electrical conductivity. These results suggest the possibility that the FPN technique is able to become powerful tool for repairing of device patterning.
引用
收藏
页码:527 / 531
页数:5
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