Micro Vibration Measurement with Microscopic Speckle Interferometry Based on Orthogonal Phase

被引：0
|
作者：
Gao, Chenjia [1 ]
Gao, Zhan [1 ]
Niu, Yuhao [1 ]
Wang, Xu [1 ]
Zhao, Jieming [1 ]
Deng, Lin [1 ]
机构：
[1] Beijing Jiaotong Univ, Minist Educ, Key Lab Luminescence & Opt Informat, Beijing 100044, Peoples R China
来源：
APPLIED SCIENCES-BASEL | 2021年 / 11卷 / 11期
基金：
中国国家自然科学基金;
关键词：
micro vibration; real-time; full-field; microscopic speckle interferometry; orthogonal phase; FULL-FIELD INTERFEROMETER; MICHELSON INTERFEROMETER; LASER INTERFEROMETER; SURFACE; AMPLITUDE;
D O I：
10.3390/app11115251
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
A micro-device vibration measurement method based on microscopic speckle interferometry combined with orthogonal phase is presented. This method utilizes the approximate linear distribution characteristics of orthogonal points (points satisfying the condition that the initial phase difference equal to pi/2) to quickly obtain the vibration information of the measured object. Compared with common optical measurement methods, this method does not require scanning imaging and can realize real-time full-field measurement. Moreover, the measurement principle and equipment is simple, so there is no need to introduce a stroboscopic light source or heterodyne device.
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页数：12
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