Preparation of TiO2 nonparticle thin film with sol-gel process

被引:6
|
作者
Shen, J [1 ]
Weng, ZN [1 ]
Zhang, YL [1 ]
Deng, ZS [1 ]
Yang, TH [1 ]
Wang, J [1 ]
Chen, LY [1 ]
机构
[1] Tongji Univ, Pohl Inst Solid State Phys, Shanghai 200092, Peoples R China
关键词
thin film; sol-gel process; spin coating; nanoparticle; refractive index;
D O I
10.1117/12.300677
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
TiO2 nanoparticle thin films are fabricated via sol-gel process followed by dip and spill coating technique, using Ti(OC4H9)(4) as raw material. A complexing agent is used in order to form a stable sol, Experiments show that the colloidal particles in the sols are relatively large under basic catalyst conditions, while under acidic conditions, the colloidal particles are only about several nanometers. The properties and structures of the films are studied. The films are normally homogeneous and crack-free. TEM shows that the films are composed of nanoparticles with a certain porosity. Under the thermal treatment of 80 degrees C, the porosity and thickness of the film decrease while the refractive index increases from the original 1.70 to the final 1.89. When the temperature of the thermal treatment goes up, the size of the nanoparticles increases and crystallization occurs.
引用
收藏
页码:240 / 243
页数:4
相关论文
共 50 条
  • [41] Preparation of TiO2 nanoparticles by sol-gel route
    Bessekhouad, Y
    Robert, D
    Weber, JV
    INTERNATIONAL JOURNAL OF PHOTOENERGY, 2003, 5 (03) : 153 - 158
  • [42] Properties of TiO2 thin films prepared using sol-gel process
    Rojviroon, T.
    Sirivithayapakorn, S.
    SURFACE ENGINEERING, 2013, 29 (01) : 77 - 80
  • [43] Properties of TiO2 thin films prepared using sol-gel process
    Rojviroon, T.
    Sirivithayapakorn, S.
    Energy Materials: Materials Science and Engineering for Energy Systems, 2013, 8 (01): : 77 - 80
  • [44] Effect of TiO2 addition on the preparation of β-spodumene powders by sol-gel process
    Wang, MC
    Lin, MH
    Liu, HS
    JOURNAL OF MATERIALS RESEARCH, 1999, 14 (01) : 196 - 203
  • [45] Photocatalytic behavior of TiO2 thin films prepared by sol-gel process
    Yoon, KH
    Noh, JS
    Kwon, CH
    Muhammed, M
    MATERIALS CHEMISTRY AND PHYSICS, 2006, 95 (01) : 79 - 83
  • [46] Preparation of large scale photocatalytic TiO2 films by the sol-gel process
    Lopez, L.
    Daoud, W. A.
    Dutta, D.
    SURFACE & COATINGS TECHNOLOGY, 2010, 205 (02): : 251 - 257
  • [47] Effect of TiO2 addition on the preparation of β-spodumene powders by sol-gel process
    Moo-Chin Wang
    Ming-Hong Lin
    Hok-Shing Liu
    Journal of Materials Research, 1999, 14 : 196 - 203
  • [48] Elaboration and characterization of thin films of TiO2 prepared by sol-gel process
    Legrand-Buscema, C
    Malibert, C
    Bach, S
    THIN SOLID FILMS, 2002, 418 (02) : 79 - 84
  • [49] Preparation of TiO2 hollow nanofibers by electrospining combined with sol-gel process
    Cheng, Yongliang
    Huang, Wenzhi
    Zhang, Yanfei
    Zhu, Ling
    Liu, Yangjia
    Fan, Xizhi
    Cao, Xueqiang
    CRYSTENGCOMM, 2010, 12 (07): : 2256 - 2260
  • [50] Preparation of Li+-doped TiO2 films by sol-gel process
    Zhou, F
    Liang, KM
    Shao, H
    Hu, AM
    HIGH-PERFORMANCE CERAMICS III, PTS 1 AND 2, 2005, 280-283 : 805 - 807