Physical and optical properties of sputtered lithium niobate thin films

被引：1
|
作者：
Lu, DX [1 ]
Wong, EMW [1 ]
Pun, EYB [1 ]
Chung, PS [1 ]
机构：
[1] CITY UNIV HONG KONG,DEPT ELECT ENGN,OPTOELECT RES CTR,KOWLOON,HONG KONG
来源：
ELECTRO-OPTIC AND SECOND HARMONIC GENERATION MATERIALS, DEVICES, AND APPLICATIONS | 1996年 / 2897卷
关键词：
rf magnetron sputtering; LiNbO3 thin films; crystalline structure; transmittance;
D O I：
10.1117/12.252926
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：361 / 368
页数：4
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