Interface-related thickness dependence of the tunability in BaSrTiO3 thin films

被引:26
|
作者
Ellerkmann, U [1 ]
Liedtke, R
Boettger, U
Waser, R
机构
[1] Rhein Westfal TH Aachen, Inst Werkstoffe Elektrotech, D-52056 Aachen, Germany
[2] Forschungszentrum Julich, Inst Festkorperforsch, D-52425 Julich, Germany
关键词
D O I
10.1063/1.1824173
中图分类号
O59 [应用物理学];
学科分类号
摘要
The thickness dependence of the tunability of Ba0.7Sr0.3TiO3 thin films is investigated. The capacitance-voltage curves, revealing the tunability of the films with thickness from 30 to 370 nm, show a strong thickness dependence. This is attributed to a bias-independent interface capacity. The interface suppresses the permittivity of the film with increasing influence for decreasing film thickness, whereas the tunability of the bulk of the film remains constant. Calculations are performed from a thermodynamic model based on the Landau-Ginzburg-Devonshire theory leading to the assumption of the bias-independent interface capacity. The bias dependence of the bulk of the films derived from measurement data are in very good agreement with the theoretically derived values. (C) 2004 American Institute of Physics.
引用
收藏
页码:4708 / 4710
页数:3
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