Dependence of cathodoluminescence on layer resistance applied for measurement of thin-layer sheet resistance

被引：2

作者：

Czerwinski, A. ^{[1
]}

Pluska, M. ^{[1
]}

Ratajczak, J. ^{[1
]}

Szerling, A. ^{[1
]}

Katcki, J. ^{[1
]}

机构：

[1] Inst Electr Mat Technol, PL-02668 Warsaw, Poland

来源：

JOURNAL OF MICROSCOPY | 2010年 / 237卷 / 03期

关键词：

Cathodoluminescence; lasers; semiconductors; TRANSPORT;

D O I：

10.1111/j.1365-2818.2009.03248.x

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

The dependence of spatially and spectrally resolved cathodoluminescence in a scanning electron microscope on resistances in semiconductor structures, especially on the layer resistance, is reported. This previously unstudied dependence is utilized for thin-layer sheet resistance measurement. The method is illustrated by an assessment of lateral confinements in semiconductor-laser heterostructures.

引用

页码：304 / 307

页数：4

共 50 条

[21] THIN-LAYER MEASUREMENT OF SOIL BULK-DENSITY
FRASIER, GW
KEISER, J
[J]. JOURNAL OF RANGE MANAGEMENT, 1993, 46 (01): : 91 - 93
[22] ENGINE WEAR MEASUREMENT BY THIN-LAYER ACTIVATION METHOD
YAMAMOTO, M
KAWAMOTO, J
[J]. JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS, 1990, 35 (01) : 26 - 30
[23] MEASUREMENT OF THIN-LAYER SURFACE STRESSES BY INDENTATION FRACTURE
LAWN, BR
FULLER, ER
[J]. JOURNAL OF MATERIALS SCIENCE, 1984, 19 (12) : 4061 - 4067
[24] QUANTITATION IN THIN-LAYER CHROMATOGRAPHY BY SPECTRAL REFLECTANCE MEASUREMENT
LYLE, SJ
TEHRANI, MS
[J]. JOURNAL OF CHROMATOGRAPHIC SCIENCE, 1979, 17 (06) : 317 - 321
[25] MEASUREMENT OF THYMINE DIMERS IN DNA BY THIN-LAYER CHROMATOGRAPHY
GOLDMANN, K
FRIEDBERG, EC
[J]. ANALYTICAL BIOCHEMISTRY, 1973, 53 (01) : 124 - 131
[26] THE THIN-LAYER ACTIVATION TECHNIQUE APPLIED TO THE ONLINE IRON WEAR MEASUREMENT OF AN ENGINE CAM NOSE
KOSAKO, T
NISHIMURA, K
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 56-7 : 900 - 903
[27] The Assessment of Wear Resistance of Thin-Layer Carbide Coatings under Vacuum Arc Deposition
Krasnyy, V. A.
Vazhenin, A. Yu
[J]. PROCEEDINGS OF THE INTERNATIONAL SYMPOSIUM ENGINEERING AND EARTH SCIENCES: APPLIED AND FUNDAMENTAL RESEARCH (ISEES 2018), 2018, 177 : 213 - 217
[28] MEASUREMENT OF INTRACELLULAR DIACYLGLYCEROLS BY ACETYLATION AND THIN-LAYER CHROMATOGRAPHY
HOSKINS, JA
EVANS, CE
[J]. JOURNAL OF CHROMATOGRAPHY-BIOMEDICAL APPLICATIONS, 1989, 490 (02): : 439 - 443
[29] IMPROVEMENT IN OXIDATION RESISTANCE OF ZIRCALOY-4 BY SURFACE ALLOYING WITH A THIN-LAYER OF PALLADIUM
ELOFF, GA
GREYLING, CJ
VILJOEN, PE
[J]. JOURNAL OF NUCLEAR MATERIALS, 1993, 202 (03) : 239 - 244
[30] SINTERED THIN-LAYER CHROMATOGRAPHY .16. APPLICATION OF SINTERED THIN-LAYER CHROMATOGRAPHY TO THIN-LAYER GEL-FILTRATION
OKUMURA, T
[J]. BUNSEKI KAGAKU, 1977, 26 (04) : 214 - 219

← 1 2 3 4 5 →