Continuous in line monitoring of Cl2 and HCl in water-vapor-saturated gas streams using mass spectrometry

被引：0
|
作者：
Arno, J [1 ]
机构：
[1] ATMI EcoSys, Danbury, CT 06810 USA
来源：
SPECTROSCOPY | 1998年 / 13卷 / 02期
关键词：
D O I：
暂无
中图分类号：
O433 [光谱学];
学科分类号：
0703 ; 070302 ;
摘要：
Process and environmental gas analyses have been available for a number of years for regulatory, process-control, and quality-improvement purposes. In-line characterization of gases in real time involves a combination of speed, multicomponent analysis, reliability, and accuracy. This article describes an innovative analytical method to measure low concentrations of Cl-2, and HCl in water-vapor-saturated conditions. We discuss the essential components of the setup, analytical method, calibrations, and testing, demonstrating the advantages of this method over existing analytical techniques.
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页码：54 / +
页数：6
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