Simultaneous measurement of gas concentration and temperature by the ball surface acoustic wave sensor

We have developed a ball surface acoustic wave (SAW) trace moisture sensor with an amorphous silica sensitive film and realized wide-range measurement from 0.017 ppmv [a frost point (FP) of -99 degrees C] to 6.0 x 10(3) ppmv (0 degrees C FP). However, since the sensitivity of the sensor depends on the temperature, measurement results are disturbed when the temperature largely changes. To overcome this problem, we developed a method to simultaneously measure temperature and gas concentration using a ball SAW sensor. Temperature and concentration is derived by solving equations for the delay time change at two frequencies. When the temperature had a large jump, the delay time change was significantly disturbed, but the water concentration was almost correctly measured, by compensating the sensitivity change using measured temperature. The temperature measured by a ball SAW sensor will also be used to control the ball temperature. This method will make a ball SAW sensor reliable in environments of varying temperatures. (C) 2017 The Japan Society of Applied Physics