On-line measurement system for monitoring ring tool misalignments

被引：0

作者：

Xie, T ^{[1
]}

Greivenkamp, JE ^{[1
]}

机构：

[1] Univ Arizona, Ctr Opt Sci, Tucson, AZ 85721 USA

来源：

OPTICAL MANUFACTURING AND TESTING II | 1997年 / 3134卷

关键词：

D O I：

10.1117/12.295150

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A new metrology technique was developed for on-line tool misalignment detection. It is an image based metrology system. It measures surface slope functions from the captured reflected image off the test surface. The measured surface slope function is then used to determine the corresponding tool. misalignments in the ring grinding setup for the Opticam surface generator, A prototype detection system was built and tested on-line in the Opticam machine. The experimental results are presented in this paper.

引用

页码：494 / 503

页数：2

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