[1] Univ Shanghai Sci & Technol, Sch Mech Engn, Shanghai 200093, Peoples R China
[2] Fudan Univ, Dept Mat Sci, Shanghai 200433, Peoples R China
[3] Univ Shanghai Sci & Technol, Inst Photon Chips, Shanghai 200093, Peoples R China
[4] Univ Shanghai Sci & Technol, Ctr Artificial Intelligence Nanophoton, Sch Opt Elect & Comp Engn, Shanghai 200093, Peoples R China