Enhanced Ferroelectric Properties of Pb(Hf0.3Ti0.7)O3 Thin Films by SrRuO3 Bottom Electrode

被引：1
|
作者：
Lin, Yali [1 ]
Zhu, Jun [1 ]
Wu, Zhipeng [1 ]
Luo, Wenbo [1 ]
Li, Yanrong [1 ]
机构：
[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China
来源：
FERROELECTRICS | 2016年 / 492卷 / 01期
基金：
美国国家科学基金会;
关键词：
PHT; Pt; SrRuO3; figure; leakage current density; ELECTRICAL-PROPERTIES;
D O I：
10.1080/00150193.2015.1072680
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Lead Hafnate-Titanate, Pb(Hf0.3Ti0.7)O-3 (PHT), films were fabricated by PLD on Al2O3 (0001) substrates with Pt or SrRuO3 (SRO) bottom electrodes, respectively. There is a certain amount of pyrochlore phase in PHT films on Pt/Al2O3. In contrast, the PHT films on SRO/Al2O3 show pure pervoskite phase. Furthermore, the PHT thin films on SRO/Al2O3, show uniform gain size and significantly enhanced ferroelectric properties with larger remnant polarization (2Pr = 59.1C/cm(2)), better fatigue endurance and lower leakage current density (8.5 x 10(-8)A/cm(2) at 150kV/cm). With the enhanced properties, PHT ferroelectric film on SRO electrode could be a promising structure which can be applied in FeRAM.
引用
收藏
页码：143 / 149
页数：7
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